Dr. Yukiteru Matsui,Yukiteru Matsui received his B. E. degree and M. E. degree in electrical engineering from Tohoku University, Japan in 1995 and 1997 respectively. He Joined Toshiba Corp. in 1997 and has been engaged in R&D of CMP process. He received his D. E. degree in chemical engineering from Tokyo Institute of Technology, Japan in 2011. He is currently a chief specialist at Toshiba Corp.